EFFECT OF Ti:Zr RATIO ON THE STRUCTURERAL, HYDROPHILIC  AND BIOCOMPATIBLE PROPERTIES OF TiZrN THIN FILMS

Phạm Thị Mai Phương; Nguyễn Đăng Tuyên; Trần Bá Đức; Nguyễn Thi Thu Hiền; Phạm Văn Huấn; Phạm Anh Tuân; Phạm Hùng Vượng; Nguyễn Duy Cường

doi:10.34238/tnu-jst.8921

EFFECT OF Ti:Zr RATIO ON THE STRUCTURERAL, HYDROPHILIC AND BIOCOMPATIBLE PROPERTIES OF TiZrN THIN FILMS

About this article

Received: 06/10/23 Revised: 23/11/23 Published: 24/11/23

Authors

1. Pham Thi Mai Phuong, Hanoi University of Science and Technology
2. Nguyen Dang Tuyen, Hanoi University of Science and Technology
3. Tran Ba Duc, Hanoi University of Science and Technology
4. Nguyen Thi Thu Hien, Electric Power University
5. Pham Van Huan, Electric Power University
6. Pham Anh Tuan, Electric Power University
7. Pham Hung Vuong, Hanoi University of Science and Technology
8. Nguyen Duy Cuong , Hanoi University of Science and Technology

Abstract

In this article, we investigated the influence of the Ti/Zr ratio on the structural properties, water wettability, and cell compatibility of TiZrN thin films fabricated by sputtering method. All TiZrN thin films were deposited at room temperature under working pressure of 5 mtorr by dc-magnetron sputtering. By varying the Ti/Zr ratio through adjusting the sputtering power of the Zr source, we observed changes in the surface morphology, crystallinity, and water wettability of the TiZrN films. Increasing the Zr sputtering power resulted in a significant decrease in crystallinity and surface roughness. The contact angle increased from 65° to 81°, and the surface roughness decreased from 5.53 nm to 1.42 nm. All the films exhibited good compatibility with BHK cells. After 72 hours of culturing, the BHK cells proliferated and adhered to most positions on the surface of the TiZrN films. This indicates that TiZrN films have great potential for applications in biomedical implants.

Keywords

TiZrN thin films; Sputtering; Ti:Zr atomic ratio; Electrical property; Mechanical property

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DOI: https://doi.org/10.34238/tnu-jst.8921

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